The 2-Minute Rule for Tantalum sputtering targets
The 2-Minute Rule for Tantalum sputtering targets
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Layer termination from ellipsometric facts is completely integrated into Aeres®. A range of multi-wavelength and spectroscopic ellipsometry solutions are available Along with the ion beam sputter deposition program.
In-situ optical checking and control is on the market by Angstrom’s optical checking & control deal.
Goal rotation and carousel indexing each have torque feeling, stopping any process troubles on account of slips or jams in rotation.
In-situ ellipsometry delivers essential info on the performance of an optical movie when it truly is being deposited.
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Variable angle phases make it possible for for extremely highly effective skinny film strategies. On the other hand, amongst its most important issues is reproducibility. The substrate is frequently established at a very oblique angle in relation to the source, and also the movies are really delicate to the precision of the angle.
Angstrom Engineering® designs and engineers Each individual Reticle® platform to deliver our companions from the optics Neighborhood the ability to build the films they have to have with great purity, density, and uniformity, all in the extremely repeatable and automated trend.
Our one of a kind design and style permits direct or indirect monitoring in the variable angle phase, eradicating the necessity for tooling components or maybe a witness glass changer. Find out more regarding the Optical Monitoring & Manage offer below.
IBSD processes may utilize a secondary ion resource for substrate cleaning and energetic support, substrate heating for reactive deposition, As well as in-situ optical monitoring or ellipsometry for critical layer thickness termination.
The IBSD course of action generates a very energetic flux of deposition product, bringing about films with enhanced density, hardness, and area roughness compared to People deposited by evaporation processes.
The deposition ion resource is directed towards a fabric target that has been optimized in each dimensions and position for your essential High-purity metal products deposition geometry.
Self-aligned ion optics are configured specifically for the desired deposition needs and geometry of the course of action.
Angstrom Engineering’s Reticle® devices give a change-critical solution for all those wanting to notice any optical design into a higher-functionality movie.
Dynamic uniformity shaping is attained utilizing a flux correction shield among the deposition source along with the substrate.
Just about every axis of movement is managed by means of Aeres® applying precision servo motors, delivering a lot better than 0.one degrees of positional precision. Entrance side infrared heating bulbs tilt with the stage to supply a reliable temperature profile for reactive processes.